rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Materials issues and modeling for device nanofabrication
    sub title: symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A
  name:
    name part: Merhari, Lhadi.
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: pau
    date issued: 2000
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiii, 340 pages : illustrations ; 24 cm.
  note: editors, Lhadi Merhari [and others].
  note: Includes bibliographical references and indexes.
  subject:
    topic: Integrated circuits
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Nanotechnology
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Materials
    genre: Congresses
  subject:
    topic: Molecular electronics
    genre: Congresses
  subject:
    topic: Microlithography
    genre: Congresses
  classification: TK7874 .M3439 2000
  classification: 621.3815
  related item:
    title info:
      title: Materials Research Society symposia proceedings ; v. 584
  identifier: 1558994920
  identifier: 00031885
  record info:
    record content source: DLC
    record creation date: 000418
    record change date: 20151022112413.0
    record identifier: in00001576992