Cover Image

Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Merhari, Lhadi
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2000]
Series:Materials Research Society symposia proceedings ; v. 584.
Subjects:
Integrated circuits > Design and construction > Congresses.
Nanotechnology > Congresses.
Integrated circuits > Materials > Congresses.
Molecular electronics > Congresses.
Microlithography > Congresses.
Description
Physical Description:xiii, 340 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558994920