Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA /
| Corporate Authors: | Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization), Electrochemical Society, American Vacuum Society |
|---|---|
| Other Authors: | Burnett, David, Kimura, ShinĂchiro, Singh, Bhanwar |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[2000]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4181. |
| Subjects: |
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