Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization), Electrochemical Society, American Vacuum Society
Other Authors: Burnett, David, Kimura, ShinĂ­chiro, Singh, Bhanwar
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4181.
Subjects:

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