Cover Image

Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization), Electrochemical Society, American Vacuum Society
Other Authors: Burnett, David, Kimura, Shiníchiro, Singh, Bhanwar
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4181.
Subjects:
Integrated optics > Congresses.
Microlithography > Congresses.
Semiconductors > Congresses.
Optical interconnects > Congresses.
Microelectronics > Congresses.
Description
Physical Description:ix, 344 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819438421