APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization), Electrochemical Society, American Vacuum Society, Burnett, D., Kimura, S., & Singh, B. (2000). Challenges in process integration and device technology: 18-19 September 2000, Santa Clara, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization), Electrochemical Society, American Vacuum Society, David Burnett, Shiníchiro Kimura, and Bhanwar Singh. Challenges in Process Integration and Device Technology: 18-19 September 2000, Santa Clara, USA. Bellingham, Wash., USA: SPIE, 2000.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Challenges in Process Integration and Device Technology: 18-19 September 2000, Santa Clara, USA. SPIE, 2000.