Cover Image

Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors: Peeters, Eric, Paul, Oliver
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4176.
Subjects:
Electromechanical devices > Congresses.
Micromechanics > Congresses.
Micromachining > Congresses.
Description
Physical Description:viii, 282 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819438324
9780819438324