rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Nano- and microelectromechanical systems
    sub title: fundamentals of nano- and microengineering
  name:
    name part: Lyshevski, Sergey Edward.
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: flu
    date issued: 2001
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 338 pages : illustrations ; 25 cm.
  table of contents: Nano- and microengineering, and nano- and microtechnologies -- Mathematical models and design of nano- and microelectromechanical systems -- Structural design, modeling, and simulation -- Control of nano- and microelectromechanical systems.
  note: Sergey Edward Lyshevski.
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
  classification: TK7875 .L96 2001
  classification: 621.381
  related item:
    title info:
      title: Nano- and microscience, engineering, technology, and medicine series
  identifier: 0849309166 (alk. paper)
  identifier: 00057953
  record info:
    record content source: DLC
    record creation date: 000628
    record change date: 20151022093714.0
    record identifier: in00001575388