http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Nano- and microelectromechanical systems
fundamentals of nano- and microengineering
Nano- and microengineering, and nano- and microtechnologies -- Mathematical models and design of nano- and microelectromechanical systems -- Structural design, modeling, and simulation -- Control of nano- and microelectromechanical systems.
Includes bibliographical references and index.
Nano- and microscience, engineering, technology, and medicine series