rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Micro-opto-electro-mechanical systems
    sub title: 22-23 May 2000, Glasgow, Scotland, United Kingdom
  name:
    name part: Syms, R. R. A.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: European Optical Society
  name:
    name part: Institution of Electrical Engineers
  name:
    name part: Institution of Mechanical Engineers (Great Britain)
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2000
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 192 pages : illustrations ; 28 cm.
  note: Richard R.A. Syms, chair/editor ; sponsored by EOS--European Optical Society [and others] ; cooperating organizations, IEE--Institute of Electrical Engineers [and] IMechE--the Institution of Mechanical Engineers (UK).
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    genre: Congresses
  subject:
    topic: Optoelectronic devices
    genre: Congresses
  subject:
    topic: Microfabrication
    genre: Congresses
  related item:
    title info:
      title: Europto series
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 4075
  identifier: 0819437123
  record info:
    record content source: CUS
    record creation date: 001009
    record change date: 20151022085940.0
    record identifier: in00001567107