Growth mechanisms during homoepitaxial growth of silicon /

Bibliographic Details
Main Author: Wingerden, Johannes van, 1965-
Format: Thesis Book
Language:English
Language Notes:Summary also in Dutch.
Published: Delft : Delft University Press, [1999]
Subjects:
Description
Physical Description:xvi, 95 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references.
ISBN:9040718717