Growth mechanisms during homoepitaxial growth of silicon /
| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Language Notes: | Summary also in Dutch. |
| Published: |
Delft :
Delft University Press,
[1999]
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| Subjects: |
| Physical Description: | xvi, 95 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 9040718717 |