rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Micromachining techniques using layers grown in an epitaxial reactor
  name:
    name part: Gennissen, Paulus Thomas Johannes
    name part: 1968-
    role:
      role term: creator
  type of resource: text
  genre: abstract or summary
  origin info:
    place:
      place term: ne
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 154 pages : illustrations ; 24 cm.
  note: Paulus Thomas Johannes Gennissen.
  note: Vita.
  note: Ph. D. Delft University 1998.
  note: Includes abstract and bibliographical references.
  subject:
    topic: Micromachining
  subject:
    topic: Epitaxy
  identifier: 9040718431
  record info:
    record content source: UUM
    record creation date: 000705
    record change date: 20151022073648.0
    record identifier: in00001555984