Cover Image

Micromachining techniques using layers grown in an epitaxial reactor /

Bibliographic Details
Main Author: Gennissen, Paulus Thomas Johannes, 1968-
Format: Thesis Book
Language:English
Published: Delft, Netherlands : Delft University Press, 1999.
Subjects:
Micromachining.
Epitaxy.
Description
Item Description:Vita.
Physical Description:154 pages : illustrations ; 24 cm.
Bibliography:Includes abstract and bibliographical references.
ISBN:9040718431