Cover Image

Design, test, integration, and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France /

Bibliographic Details
Other Authors: Courtois, B. (Bernard)
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--the International Society for Optical Engineering, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4019.
Subjects:
Microelectromechanical systems > Congresses.
Optoelectronic devices > Congresses.
Micromachining > Congresses.
Microelectronic packaging > Congresses.
Description
Physical Description:xv, 596 pages : illustrations ; 28 cm.
ISBN:0819436453