Cover Image

Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, California /

Bibliographic Details
Corporate Authors: United States. Air Force. Office of Scientific Research, Society of Photo-optical Instrumentation Engineers
Other Authors: Helvajian, Henry
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3933.
Subjects:
Microelectronics industry > Congresses.
Lasers > Industrial applications > Congresses.
Manufacturing processes > Congresses.
Optoelectronics industry > Congresses.
Description
Physical Description:xi, 514 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819435503