Handbook of chemical vapor depostion [as printed] (CVD) : principles, technology, and applications /
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| Format: | Book |
| Language: | English |
| Published: |
Norwich, N.Y. :
Noyes Publications/William Andrew Pub.,
[1999]
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| Edition: | 2nd ed. |
| Series: | Materials science and process technology series.
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| Subjects: |
| Item Description: | Revised edition of: Handbook of chemical vapor deposition (CVD), c1992. |
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| Physical Description: | xxiv, 482 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0815514328 |