rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Advanced metallization and interconnect systems for ULSI applications in 1997
    sub title: proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan
  name:
    name part: Cheung, Robin.
  name:
    name part: University of California, Berkeley
    name part: Continuing Education in Engineering.
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: pau
    date issued: 1998
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xviii, 765 pages : illustrations ; 24 cm.
  note: editors, Robin Cheung [and others].
  note: Includes bibliographical references and indexes.
  subject:
    topic: Integrated circuits
    topic: Ultra large scale integration
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Ultra large scale integration
    topic: Materials
    genre: Congresses
  subject:
    topic: Vapor-plating
    genre: Congresses
  subject:
    topic: Electrochemical metallizing
    genre: Congresses
  subject:
    topic: Dielectrics
    genre: Congresses
  classification: TK7874.76 .A313 1998
  classification: 621.39/5
  related item:
    title info:
      title: Materials Research Society conference proceedings
  identifier: 1558994122
  identifier: 98134591
  record info:
    record content source: DLC
    record creation date: 000418
    record change date: 20151022051507.0
    record identifier: in00001537973