http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Advanced metallization and interconnect systems for ULSI applications in 1997
proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan
xviii, 765 pages : illustrations ; 24 cm.
Includes bibliographical references and indexes.
Materials Research Society conference proceedings