Physical vapor deposition of thin films /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Wiley,
[2000]
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| Subjects: |
| Item Description: | "A Wiley-Interscience publication." |
|---|---|
| Physical Description: | xiii, 312 pages, 4 unnumbered pages of plates : illustrations (some color) ; 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0471330019 (cloth : alk. paper) |