rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Chemical-mechanical polishing--fundamentals and changes
    sub title: symposium held April 5-7, 1999, San Francisco, California, U.S.A
  title info:
    title: Chemical-mechanical polishing
  name:
    name part: Babu, S. V.
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: pau
    date issued: 2000
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 281 pages : illustrations ; 24 cm.
  note: editors, S.V. Babu [and others].
  note: Includes bibliographical references and indexes.
  subject:
    topic: Electrolytic polishing
    genre: Congresses
  subject:
    topic: Grinding and polishing
    genre: Congresses
  classification: TS654.5. C48 2000
  classification: 621.3815/2
  related item:
    title info:
      title: Materials Research Society symposia proceedings ; v. 566
  identifier: 1558994734
  identifier: 99058801
  record info:
    record content source: DLC
    record creation date: 991117
    record change date: 20151022053609.0
    record identifier: in00001533441