Babu, S. V. (2000). Chemical-mechanical polishing--fundamentals and changes: Symposium held April 5-7, 1999, San Francisco, California, U.S.A. Materials Research Society.
Chicago Style (17th ed.) CitationBabu, S. V. Chemical-mechanical Polishing--fundamentals and Changes: Symposium Held April 5-7, 1999, San Francisco, California, U.S.A. Warrendale, Pa.: Materials Research Society, 2000.
MLA (9th ed.) CitationBabu, S. V. Chemical-mechanical Polishing--fundamentals and Changes: Symposium Held April 5-7, 1999, San Francisco, California, U.S.A. Materials Research Society, 2000.
Warning: These citations may not always be 100% accurate.