Cover Image

Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems : MEMS 2000 : Miyazaki, Japan, January 23-27, 2000 /

Bibliographic Details
Corporate Authors: IEEE International Conference on Micro Electro Mechanical Systems Miyazaki, Japan, IEEE Robotics and Automation Society, Micromachine Center (Japan)
Format: Conference Proceeding Book
Language:English
Published: Piscataway N.J. : Institute of Electrical and Electronics Engineers, [2000]
Subjects:
Microelectromechanical systems > Congresses.
Description
Item Description:"IEEE catalog number 00CH36308"--Title page verso.
Physical Description:xiv, 810 pages : illustrations ; 30 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0780352734 (softbound)
0780352742 (casebound)
0780352750 (microfiche)