Microsensor applications of porous silicon : from humidity-sensitive sheet to sacrificial layer /
| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
Maastricht :
Shaker Publishing,
1999.
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| Subjects: |
| Item Description: | Errata slip inserted. |
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| Physical Description: | iv, 188 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 9042300809 |