rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microengineering technology for space systems
  name:
    name part: Helvajian, Henry.
  name:
    name part: Aerospace Corporation
  name:
    name part: Aerospace Press
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: cau
    date issued: 1997
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 209 pages : illustrations ; 28 cm.
  note: edited by H. Helvajian.
  note: Includes bibliographical references.
  subject:
    topic: Integrated circuits
    topic: Very large scale integration
    topic: Design and construction
  subject:
    topic: Microlithography
  subject:
    topic: Nanostructured materials
  related item:
    title info:
      title: Monograph (Aerospace Press) ; 97-02
  record info:
    record content source: DID
    record creation date: 000331
    record change date: 20151022050440.0
    record identifier: in00001529481