rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    non sort: The
    title: science and engineering of microelectronic fabrication
  name:
    name part: Campbell, Stephen A.
    name part: 1954-
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nyu
    date issued: 1996
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xv, 536 pages : illustrations ; 25 cm.
  note: Stephen A. Campbell.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    topic: Design and construction
  classification: TK7871.85 .C25 1996
  classification: 621.3815/2
  related item:
    title info:
      title: Oxford series in electrical engineering
  identifier: 0195105087 (cl : acid-free paper)
  identifier: 95035577
  record info:
    record content source: DLC
    record creation date: 000330
    record change date: 20151022050230.0
    record identifier: in00001526585