Cover Image

EUV, X-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: MacDonald, Carolyn A.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3767.
Subjects:
X-ray optics > Congresses.
Lithography, Electron beam > Congresses.
Ion beam lithography > Congresses.
Grenz rays > Congresses.
Neutron sources > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/3767.toc
Description
Physical Description:x, 394 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819432539