rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Electronics and structures for MEMS
    sub title: 27-29 October 1999, Royal Pines Resort, Queensland, Australia
  name:
    name part: Bergmann, Neil W.
  name:
    name part: Reinhold, Olaf.
  name:
    name part: Tien, Norman C.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: Institution of Radio and Electronics Engineers, Australia
  name:
    name part: Queensland
    name part: Government State Development.
  name:
    name part: Griffith University Microelectronics Engineering Society
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 428 pages : illustrations ; 28 cm.
  note: Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) [and others].
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    genre: Congresses
  subject:
    topic: Smart structures
    genre: Congresses
  subject:
    topic: Microelectronics
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 3891
  identifier: 0819434922
  record info:
    record content source: CUS
    record creation date: 000301
    record change date: 20151021173636.0
    record identifier: in00001518401