Cover Image

Electronics and structures for MEMS : 27-29 October 1999, Royal Pines Resort, Queensland, Australia /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Institution of Radio and Electronics Engineers, Australia, Queensland. Government State Development, Griffith University Microelectronics Engineering Society
Other Authors: Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3891.
Subjects:
Microelectromechanical systems > Congresses.
Smart structures > Congresses.
Microelectronics > Congresses.
Description
Physical Description:viii, 428 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819434922