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Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization)
Other Authors: Motamedi, M. Edward, Göring, Rolf
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3878.
Subjects:
Integrated optics > Congresses.
Miniature electronic equipment > Congresses.
Micromechanics > Congresses.
Optical scanners > Congresses.
Microelectromechanical systems > Congresses.
Description
Item Description:Earlier conferences titled: Miniaturized systems with micro-optics and micromechanics.
Physical Description:viii, 426 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819434752