Laser metrology and inspection : 14-15 June 1999, Munich, Germany /
| Corporate Authors: | , |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1999]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3823. Europto series. |
| Subjects: |
| Physical Description: | vii, 298 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819433098 |