Laser metrology and inspection : 14-15 June 1999, Munich, Germany /

Bibliographic Details
Corporate Authors: European Optical Society, Society of Photo-optical Instrumentation Engineers
Other Authors: Tiziani, Hans J., Rastogi, Pramod K., 1951-
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3823.
Europto series.
Subjects:
Description
Physical Description:vii, 298 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819433098