Cover Image

Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Electrochemical Society
Other Authors: Graef, Mart, Patel, Divyesh N.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3883.
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Plasma etching > Congresses.
Metallizing > Congresses.
Dielectric films > Congresses.
Description
Physical Description:ix, 184 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819434809