rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microelectronic device technology III
    sub title: 22-23 September 1999, Santa Clara, California
  title info:
    title: Microelectronic device technology three
  title info:
    title: Microelectronic device technology 3
  name:
    name part: Burnett, David.
  name:
    name part: Tsuchiya, Toshiaki.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: Electrochemical Society
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 304 pages : illustrations ; 28 cm.
  note: David Burnett, Toshiaki Tsuchiya, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society [and others].
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    genre: Congresses
  subject:
    topic: Semiconductors
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Microelectronics
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 3881
  identifier: 0819434787
  record info:
    record content source: CUS
    record creation date: 991105
    record change date: 20151021110814.0
    record identifier: in00001512906