Cover Image

Microrobotics and microassembly : 21-22 September 1999, Boston, Massachusetts /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Nelson, Bradley J., Breguet, Jean-Marc
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3834.
Subjects:
Robotics > Congresses.
Microelectromechanical systems > Congresses.
Microfabrication > Congresses.
Description
Physical Description:vii, 222 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819434272