Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, & Vladimirsky, Y. (1999). Emerging lithographic technologies III: 15-17 March 1999, Santa Clara, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, and Yuli Vladimirsky. Emerging Lithographic Technologies III: 15-17 March 1999, Santa Clara, California. Bellingham, Washington: SPIE, 1999.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. Emerging Lithographic Technologies III: 15-17 March 1999, Santa Clara, California. SPIE, 1999.
Warning: These citations may not always be 100% accurate.