Optical metrology : proceedings of a conference held 18-19 July 1999, Denver, Colorado /
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, WA :
SPIE Optical Engineering Press,
[1999]
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| Series: | Critical reviews of optical science and technology ;
v. CR72. |
| Subjects: |
| Physical Description: | vi, 276 pages : illustrations ; 26 cm. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 0819432350 |