rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Etching in microsystem technology
  name:
    name part: Köhler, J. M. (J. Michael)
    name part: 1956-
    role:
      role term: creator
  type of resource: text
  origin info:
    place:
      place term: enk
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  language:
    language term: ger
  physical description:
    form: print
    extent: xiv, 368 pages : illustrations ; 25 cm.
  note: Michael Köhler ; translated by Antje Wiegand.
  note: Includes bibliographical references and index.
  note: Translated from the German.
  subject:
    topic: Microlithography
  subject:
    topic: Microlithography
  classification: 621.381531
  identifier: 3527295615
  record info:
    record content source: UKM
    record creation date: 990621
    record change date: 20151021090316.0
    record identifier: in00001501716