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Etching in microsystem technology /

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Bibliographic Details
Main Author: Köhler, J. M. (J. Michael), 1956-
Format: Book
Language:English
German
Language Notes:Translated from the German.
Published: Weinheim ; Chichester : Wiley-VCH, [1999]
Subjects:
Microlithography.
Description
Physical Description:xiv, 368 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3527295615