APA (7th ed.) Citation

Köhler, J. M. (1999). Etching in microsystem technology. Wiley-VCH.

Chicago Style (17th ed.) Citation

Köhler, J. M. Etching in Microsystem Technology. Weinheim ; Chichester: Wiley-VCH, 1999.

MLA (9th ed.) Citation

Köhler, J. M. Etching in Microsystem Technology. Wiley-VCH, 1999.

Warning: These citations may not always be 100% accurate.