Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, CNRS-INPG-UJF (France), IEEE Comptuer Society. Test Technology Technical Committee
Other Authors:	Courtois, B. (Bernard)
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3680.
Subjects:	Microelectromechanical systems > Testing > Congresses. Optoelectronic devices > Testing > Congresses. Micromachining > Congresses. Computer-aided design > Congresses. Detectors > Congresses.

Description
Physical Description:	2 volumes (xix, 1192 pages) : illustrations (some color) ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819431540