Cover Image

Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California /

Bibliographic Details
Corporate Authors: United States. Air Force. Office of Scientific Research, Society of Photo-optical Instrumentation Engineers
Other Authors: Dubowski, J. J.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3618.
Subjects:
Microelectronics industry > Congresses.
Lasers > Industrial applications > Congresses.
Manufacturing processes > Congresses.
Optoelectronics industry > Congresses.
Description
Physical Description:xi, 534 pages : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819430889