Cover Image

Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors: Gossmann, Hans-Joachim L.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [1999]
Series:Materials Research Society symposia proceedings ; v. 568.
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor doping > Congresses.
Silicon > Congresses.
Semiconductors > Defects > Congresses.
Description
Physical Description:xi, 298 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558994750