Cover Image

VLSI metallization : physics and technologies /

Bibliographic Details
Other Authors: Shenai, Krishna
Format: Book
Language:English
Published: Boston : Artech House, [1991]
Series:Artech House materials science library.
Subjects:
Electric contacts.
Semiconductor-metal boundaries.
Description
Physical Description:x, 529 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0890065012