APA (7th ed.) Citation

Shenai, K. (1991). VLSI metallization: Physics and technologies. Artech House.

Chicago Style (17th ed.) Citation

Shenai, Krishna. VLSI Metallization: Physics and Technologies. Boston: Artech House, 1991.

MLA (9th ed.) Citation

Shenai, Krishna. VLSI Metallization: Physics and Technologies. Artech House, 1991.

Warning: These citations may not always be 100% accurate.