APA (7th ed.) Citation

Hitchon, W. N. G. (1999). Plasma processes for semiconductor fabrication. Cambridge University Press.

Chicago Style (17th ed.) Citation

Hitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge ; New York: Cambridge University Press, 1999.

MLA (9th ed.) Citation

Hitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge University Press, 1999.