Proceedings 1998 International Symposium on Microelectronics : 1-4 November 1998, San Diego Convention Center, San Diego, California /

Bibliographic Details
Corporate Authors: International Symposium on Microelectronics San Diego, Calif., International Microelectronics and Packaging Society, Society of Photo-optical Instrumentation Engineers
Other Authors: Welterlen, James D.
Format: Conference Proceeding Book
Language:English
Published: Reston, Va., U.S.A. : IMAPS ... in cooperation with SPIE--the International Society for Optical Engineering, [1998]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3582.
Subjects:
Description
Physical Description:xx, 1046 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0930815521