Proceedings 1998 International Symposium on Microelectronics : 1-4 November 1998, San Diego Convention Center, San Diego, California /
| Corporate Authors: | , , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Reston, Va., U.S.A. :
IMAPS ... in cooperation with SPIE--the International Society for Optical Engineering,
[1998]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3582. |
| Subjects: |
| Physical Description: | xx, 1046 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0930815521 |