Selected papers on optical MEMS /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, WA :
SPIE Optical Engineering Press,
[1999]
|
| Series: | SPIE milestone series ;
v. MS 153. |
| Subjects: |
| Physical Description: | xvi, 628 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 081943129X (alk. paper) |