Lithography process control /

Optical lithography : here is why /
by: Lin, Burn Jeng, 1942-
Published: (2010)

Selected papers on resolution enhancement techniques in optical lithography /
Published: (2004)

Computational lithography /
by: Ma, Xu, 1983-
Published: (2010)

Computational lithography /
by: Ma, Xu, 1983-
Published: (2010)

Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California /
Published: (1990)

Plasma processes for semiconductor fabrication /
by: Hitchon, W. Nicholas G.
Published: (1999)

Atomic layer processing : semiconductor dry etching technology /
by: Lill, Thorsten
Published: (2021)

Principles of lithography /
by: Levinson, Harry J.
Published: (2019)

Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983 /
Published: (1983)

Dry etching for microelectronics /
Published: (1984)

Plasma etching : fundamentals and applications /
by: Sugawara, M. (Minoru)
Published: (1998)

Plasma etching in semiconductor fabrication /
by: Morgan, Russ A., 1950-
Published: (1985)

Chemistry and lithography /
by: Okoroanyanwu, Uzodinma
Published: (2020)

Etching in microsystem technology /
by: Köhler, J. M. (J. Michael), 1956-
Published: (1999)

Ätzverfahren für die Mikrotechnik /
by: Köhler, J. M. (J. Michael), 1956-
Published: (1998)

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /
Published: (1990)

Applications of plasma processes to VLSI technology /
Published: (1985)

Selected papers on optical microlithography /
Published: (1992)

Chemistry and lithography /
by: Okoroanyanwu, Uzodinma
Published: (2020)

Dry etching for VLSI /
by: Roosmalen, A. J. van
Published: (1991)

Advanced processes for 193-nm immersion lithography /
by: Wei, Yayi
Published: (2009)

Principles of lithography /
by: Levinson, Harry J.
Published: (2005)

Principles of lithography /
by: Levinson, Harry J.
Published: (2010)

Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA /
Published: (1992)

Optical lithography : here is why /
by: Lin, Burn Jeng, 1942-
Published: (2010)

10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California /
Published: (1991)

Dry etching for microelectronics /
Published: (1984)

Microlithography fundamentals in semiconductor devices and fabrication technology /
by: Nonogaki, Saburo, 1930-
Published: (1998)

Microlithography world.
Published: (1992)

Plasma processing XIII : proceedings of the International Symposium /
Published: (2000)

Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California /
Published: (1990)

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
Published: (1990)

Dry etching for VLSI /
by: Roosmalen, A. J. van
Published: (1991)

Microlithography fundamentals in semiconductor devices and fabrication technology /
by: Nonogaki, Saburo, 1930-, et al.
Published: (2018)

Semiconductor manufacturing handbook /
Published: (2005)

Selective and non-selective reactive ion etching of gallium arsenide and aluminum gallium arsenide /
by: Yost, Dennis J.
Published: (1989)