rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Lithography process control
  name:
    name part: Levinson, Harry J.
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: wau
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: x, 190 pages : illustrations ; 26 cm.
  note: Harry J. Levinson.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    topic: Etching
  subject:
    topic: Microlithography
    topic: Quality control
  classification: TK7871.85 .L464 1999
  classification: 621.3815/2
  related item:
    title info:
      title: Tutorial texts in optical engineering ; v. TT 28
  identifier: 0819430528 (softcover)
  identifier: 98044433
  record info:
    record content source: DLC
    record creation date: 980911
    record change date: 20151021062626.0
    record identifier: in00001479477