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Lithography process control /

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Bibliographic Details
Main Author: Levinson, Harry J.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE Optical Engineering Press, [1999]
Series:Tutorial texts in optical engineering ; v. TT 28.
Subjects:
Semiconductors > Etching.
Microlithography > Quality control.
Description
Physical Description:x, 190 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819430528 (softcover)