APA (7th ed.) Citation

Levinson, H. J. (1999). Lithography process control. SPIE Optical Engineering Press.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Lithography Process Control. Bellingham, Wash.: SPIE Optical Engineering Press, 1999.

MLA (9th ed.) Citation

Levinson, Harry J. Lithography Process Control. SPIE Optical Engineering Press, 1999.

Warning: These citations may not always be 100% accurate.