rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microstructural and electrical properties of resolidified submicron Al lines
  name:
    name part: Homberg, Marc Jan Christiaan van den
    name part: 1970-
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: ne
    date issued: 1998
    issuance: monographic
  language:
    language term: eng
  language:
    language term: dut
  physical description:
    form: print
    extent: 126 pages : illustrations ; 24 cm.
  note: Marc Jan Christiaan van den Homberg.
  note: doctoral Technische Universiteit Delft 1998.
  note: Includes bibliographical references.
  note: Summary also in Dutch.
  subject:
    topic: Aluminum films
  subject:
    topic: Microstructure
  subject:
    topic: Electrodiffusion
  subject:
    topic: Integrated circuits
    topic: Design and construction
  identifier: 9040716234
  record info:
    record content source: OHX
    record creation date: 980921
    record change date: 20151021060808.0
    record identifier: in00001477836
    language of cataloging:
      language term: ger