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Micro-electro-mechanical systems (MEMS) 1998 : presented at the 1998 International Mechanical Engineering Congress and Exposition : November 15-20, 1998, Anaheim, California /

Bibliographic Details
Corporate Authors: International Mechanical Engineering Congress and Exposition, American Society of Mechanical Engineers. Dynamic Systems and Control Division
Other Authors: Lin, Liwei
Format: Conference Proceeding Book
Language:English
Published: New York, N.Y. : American Society of Mechanical Engineers, ©1998.
Series:DSC (Series) ; v. 66.
Subjects:
Microelectromechanical systems > Congresses.
Fluidic devices > Congresses.
Microsystèmes électromécaniques > Congrès.
Dispositifs fluidiques > Congrès.
Fluidic devices
Microelectromechanical systems
Conference papers and proceedings

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