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|a Micro-electro-mechanical systems (MEMS) 1998 :
|b presented at the 1998 International Mechanical Engineering Congress and Exposition : November 15-20, 1998, Anaheim, California /
|c edited by Liwei Lin [and others] ; sponsored by the Dynamic Systems and Control Division, ASME [and others].
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3 |
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|a Microelectromechanical systems (MEMS)1998
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| 246 |
3 |
1 |
|a MEMS 1998
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| 260 |
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|a New York, N.Y. :
|b American Society of Mechanical Engineers,
|c ©1998.
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| 300 |
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|a x, 593 pages :
|b illustrations ;
|c 28 cm.
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| 336 |
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|a text
|b txt
|2 rdacontent
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1 |
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|a DSC ;
|v vol. 66
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| 504 |
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|a Includes bibliographical references and author index.
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| 505 |
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|a Micro-manufacturing processes in MEMS and other advanced systems -- Applications of micro-fabrication to fluid mechanics -- micro-electro-mechanical systems -- Computational methods fro analysis, design and simulation of MEMS.
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| 650 |
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|a Microelectromechanical systems
|v Congresses.
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| 650 |
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|a Fluidic devices
|v Congresses.
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| 650 |
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6 |
|a Microsystèmes électromécaniques
|v Congrès.
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| 650 |
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6 |
|a Dispositifs fluidiques
|v Congrès.
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| 650 |
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|a Fluidic devices
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|a Microelectromechanical systems
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|a Lin, Liwei.
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|a International Mechanical Engineering Congress and Exposition
|d (1998 :
|c Anaheim, Calif.)
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| 710 |
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|a American Society of Mechanical Engineers.
|b Dynamic Systems and Control Division.
|1 https://id.oclc.org/worldcat/entity/E39QQPVp83pXgqKJBgjQyxGqp6
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|a Micro-electro-mechanical systems (MEMS) 1998 (Text)
|1 https://id.oclc.org/worldcat/entity/E39PCXQT8ydQqqHmFXf98hh6Td
|4 https://id.oclc.org/worldcat/ontology/hasWork
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|e TK7874 .M453 1998
|h Library of Congress classification
|i unmediated -- volume
|m A14824088271
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